Accuracy:
< 5 um over 610mm by 610mm
< 50 um over 1.22 x 3.00 metres
1 um Resolution in both X and Y
Supply of a single piece of film 3.00 metres in length

Repeatability
2,500 dpi +/- 10 microns
5,000 dpi +/- 5 microns
10,000 dpi +/- 2.5 microns

Line width/space tolerance
2,500 dpi +/- 10 microns
5,000 dpi +/- 5 microns
10,000 dpi +/- 2.5 microns

Minimum line width / feature
2,500 dpi 20 microns
5,000 dpi 20 microns
10,000 dpi 15 microns

Line irregularity
2,500 dpi +/- 10 microns
5,000 dpi +/- 5 microns
2,500 dpi +/- 2.5 microns